Materials Science of Thin Films. Deposition and Structure by Ohring

By Ohring

  • "There is a necessity for brand new, accomplished texts and references in [advanced fabrics processing] and its subdisciplines. This has been very true for skinny motion pictures, and of the different contemporary books at the topic, Milton Ohring's huge quantity is for sure the best."
    Praise for the 1st variation , --NATURE

    "Ohring's very well timed and ideal publication fills a long-existing want in fabrics schooling on the graduate level....The ebook is particularly good written, offered, and illustrated. it's going to turn out important to the scientist or engineer in coatings, to the school senior engaged on a undertaking, and particularly to graduate scholars in fabrics technology and engineering and to college desirous about instructing or learn within the quarter of skinny movies. an exceptional acquisition for a tutorial library."

    "The writer writes in a fluent and fascinating kind which the scholar must have little hassle in knowing. His examples and technical insights do greatly to make his textual content readable..."
    --R.J. BORG

    "The mixture of educating, study, and business involvement has offer Profesor Ohring with a vast viewpoint of skinny movie technological know-how and technoloy and super perception into the wishes of scholars coming into this interesting box. His perception and event are rather obtrusive during this textbook."
    --JOHN L. VOSSEN, John Vossen affiliates, Inc.

    "The textual content is straightforward to learn, technically right, unfolds in a logical demeanour, and encompasses a huge variety of very important beneficial properties regarding skinny movies. I congratulate the writer for presenting a considerate therapy of this more and more renowned subject."
    --CHARLES L. BAUER, Carnegie Mellon college

    "Professor Milt Ohring has an extended and specified standpoint of skinny movie technology from his dealings with academia and undefined. This ebook represents his accrued reviews of educating and learn. skinny movie technological know-how is on the center of a lot of our so much complicated applied sciences. This publication may still turn out useful not just to the collage pupil but additionally to the pro who wishes a large review of this crucial field."
    --J.M. POATE, AT&T Bell Laboratories

Foreword to first edition

, Page xi

, Pages xiii-xv

, Pages xvii-xviii
Historical perspective

, Pages xix-xxi
Chapter 1 - A evaluate of fabrics science

, Pages 1-56
Chapter 2 - Vacuum technology and technology

, Pages 57-93
Chapter three - Thin-film evaporation processes

, Pages 95-144
Chapter four - Discharges, plasmas, and ion-surface interactions

, Pages 145-202
Chapter five - Plasma and ion beam processing of skinny films

, Pages 203-275
Chapter 6 - Chemical vapor deposition

, Pages 277-355
Chapter 7 - Substrate surfaces and thin-film nucleation

, Pages 357-415
Chapter eight - Epitaxy

, Pages 417-494
Chapter nine - movie structure

, Pages 495-558
Chapter 10 - Characterization of skinny motion pictures and surfaces

, Pages 559-640
Chapter eleven - Interdiffusion, reactions, and changes in skinny films

, Pages 641-710
Chapter 12 - Mechanical homes of skinny films

, Pages 711-781

, Page 782

, Pages 783-794

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Extra resources for Materials Science of Thin Films. Deposition and Structure

Example text

_ USSIAN i C~~ R F C ~ . ~ . 0 ! 0 Xl~ Figure 1-16 Normalized Gaussian and erfc curves of C/C o vs x/(4Dt) 1/2. Both logarithmic and linear scales are shown. Reprinted with permission from W. E. Beadle, J. C. C. Tsai, and R. D. Plummer, Quick Reference Manual for Silicon Integrated Circuit Technology, copyright 9 1985, Bell Telephone Laboratories Inc. Published by J. Wiley & Sons, New York, 1985. the latter and ensure the integrity of films, D should be kept small, which in effect means the maintenance of low temperatures.

A1-SiO2-Si. example is the p - n junction, which is s h o w n in Fig. 1-10a w i t h o u t any applied electric fields. A c o n d i t i o n ensuring t h e r m o d y n a m i c equilibrium for the electrons is that E v be c o n s t a n t t h r o u g h o u t the system. This is accomplished t h r o u g h electron transfer from the n side with high E v (low ~,) to the p side with low EF (high ~bv). An internal built-in electric field is established because of this charge transfer, resulting in b e n d i n g of b o t h the valence a n d c o n d u c t i o n b a n d s in the j u n c t i o n region.

A more instructive way to write Eq. 1-38 is AG v = -kBT/nln(1 + S), (1-39) where S is the vapor supersaturation defined by ( P v - Ps)/Ps 9 Without supersaturation, S = 0 and AG v = 0, sd that nucleation is impossible. In our example, however, Pv > Ps and AG v is negative, which is consistent with the notion of energy reduction. Simultaneously, new surfaces and interfaces form. This results in an increase in the surface free-energy of the system given by 4rcr27, where 7 is the solid-vapor interracial energy per unit area.

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